UV light curing spin coater with 10000 RPM for 8 inches wafer

CY-SP8-UV spin coater uses the centrifugal force generated by high-speed rotation
to coat the film material. This model is equipped with an ultraviolet light source,
which can realize the drying function of special film materials.
This machine adopts precision DC brushless motor, which has fast starting speed and
stable speed, which ensures the consistency and uniformity of coating thickness.
The sample is fixed by vacuum adsorption, which is easy to operate and can be taken
and placed freely. Suction cups of various sizes can be selected according to the
sample size.Also it is simple and convenient to replace the vacuum chuck.

Technical parameter
1. Maximum speed 10000 RPM
2. Speed resolution 1 RPM
3. Maximum rotation time 3000 S
4. Rotation time resolution 1 S
5. Maximum acceleration 8000RPM/S
6. UV wavelength 365nm
7. Sample size ≤8inches
8. Size 290mm(W)x360mm(D)x370mm(H)
9. Weight 20kg
10. Power input AC200-230V，600W
11. Vacuum input requirements 0.06-0.09Mpa, vacuum flow minimum 15L/min or more
12. Vacuum interface φ8mm quick screw interface
13. Working gas Non-corrosive gases such as nitrogen, argon, oxygen, etc.

Minimum Order: 1 sets

Click to Enlarge