SWIR Cameras and Accessories in Semiconductor Inspection

In the semiconductor inspection equipment, SWIR cameras can be used to inspect
the quality of pure semiconductor material (usually silicon) after ingot
growth. Furthermore, ingots that are subsequently sliced into wafers and these
wafers can in a similar way be inspected for defects or cracks.

As the wafers are processed with successive layers to make transistors and
memory cells used in modern integrated circuits, SWIR cameras are used to check
alignment of the layers. High resolution scans of complete wafers are often
accomplished with line scan cameras at the wafer defect inspection stage.

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