Plasma Enhanced Hybrid Physical Chemical Vapor Deposition Machine

1200C PE-HPCVD Two Zone Furnace with In-situ Evaporator, 4 Channel MFC and Vacuum
Pump (import molecular pump, without oil)+INFICON vacuumeter

CY-OTF-1200X-II-PEC4 is a 1200ºC Two-Zone Plasma-Enhanced Hybrid-Physical-
Chemical Vapor Deposition (PE-HPCVD) system. It consists of a Tiltable Frame, 300W
RF Plasma Generator & Matching Network, Up-Stream Source Evaporation Boat with
Power Supply, Four-Channel MFC Gas Delivery, and High-Performance Vacuum
Pump. Such a complete system is an excellent tool for heat-treating inorganic
compound powders with superior temperature and surface coating uniformity (e.g.
prepare Li-Ion battery cathode powders with conductive coatings on the surface).

System Structure
Integrated 300W (13.56Mhz) RF power supply with matching network enables the
plasma-enhanced processing which significantly reduces the needs for high-
temperature process
Quartz tube allows processing for powders
Four-channel gas mixing station with MFCs provide precise control of gas delivery
The integration of Up-Stream Source Evaporation Boat with tungsten coil allows you
sublimate solid precursors for the needs of Hybrid Physical-Chemical processing

Minimum Order: 1 sets

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