lab-scale vacuum thermal evaporator with multi source

This equipment is a multi-source high-vacuum evaporation coating instrument.

The equipment adopts a front-opening vacuum chamber design. The chamber has a large
space and strong expandability, which can meet the evaporation coating of multiple
types of large-size samples. The chamber has an upper sample stage inside, and the
clamping or clamping type sample mounting parts can be selected according to the
user's sample style.
The sample table can be rotated, heated and raised and lowered, and all operations
are integrated and controlled through the touch screen.
The vacuum pump set of the equipment is a two-stage vacuum system, which is
composed of a dual stage rotary vane vacuum pump and a turbo molecular pump. It can
provide a clean and oil-free high vacuum environment for the vacuum coating test;
the vacuum system contains a complete pneumatic valve system, and the user can One-
touch operation through the touch screen realizes vacuuming, non-stop load and
unload sample, complete shutdown and other operations.
The equipment has two sets of evaporation sources. It adopts a tungsten boat
evaporation source and water-cooled copper electrodes. It can support a maximum
current of 300A and a heating temperature of up to 3000 ° C. It can realize the
evaporation of various refractory metals.
This equipment adopts an integrated design, and the chamber and the electric
control part are separated left and right, which realizes the separation of water
and electricity, and effectively guarantees the safety of users. The electric
control part adopts the design of the combination of touch screen and button panel.
The vacuum system, sample table and other auxiliary functions are operated by the
touch screen with one button.
The evaporation and the film thickness control are operated independently by the
panel, which is as convenient for users as possible while avoiding the possibility
of wrong operation. The equipment is well-designed and has excellent performance,
and it is an indispensable choice for laboratory high-precision evaporation coating
test.


Technical parameters
Sample stage Size
Max support φ150mm sample
Height
Adjustable up and down 70mm
Evaporation source Quantity
Tungsten Boat x2
Vacuum chamber Chamber size:Dia. 300mm X 400mm
Observation window:Front φ100mm with shading sheet
Chamber material:304 stainless steel
Opening method:Front door open
Film thickness control Crystal vibrating film thickness measuring instrument,
optional multi-channel film thickness controller
Vacuum system Backing pump:Dual stage rotary vane pump
Pumping port:KF16
Secondary pump:Turbo molecular pump
Pumping port:CF160
Vacuum measurement
Resistance + ionization
Compound vacuum gauge
Exhaust rate:Mechanical pump 1.1L / s
Molecular pump 600L / s
Ultimate vacuum:1.0E-5Pa
Power supply:AC 220V 50/60Hz
Pumping rate:Rotary vane pump: 1.1L / S
Flowmeter One way mass flowmeter 500sccm Ar gas
Control System PLC automatic control
Operation interface: touch screen + operation panel
Other Supply voltage:AC380V,50Hz
Machine size:1000mm x 800mm x 1500mm
Total power:5kW
Machine weight:350kg

Minimum Order: 1 sets

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