inductively coupled plasma generation testing equipment

This equipment is customized plasma testing equipment for customers. The main
component of the equipment is an inductively coupled plasma generator. The
generator can generate plasma in the quartz tube inside the inductance coil. The
flanges on both sides of the quartz tube are equipped with observation windows.
Users can observe experimental phenomena on the observation window or use other The
instrument measures relevant parameters. The device is controlled by a touch
screen, and the screen integrates all experimental functions, such as vacuum
extraction, flow control, and RF power adjustment. At the same time, the inductance
coil adopts water cooling design, and the outer casing has a cooling fan to ensure
the stability of the whole equipment for a long time. This equipment is an
indispensable instrument for the research of plasma-related properties in college
laboratories.

Technical parameter
Supply voltage:AC220V，50Hz
Maximum power: 1KW
Coupling method: Inductive coupling
Quartz cavity: O.Dφ30mm X 150mm wall thickness 3.5mm
Observation window size: φ30mm
Vacuum interface: KF16
Air inlet interface: 6.35mm ferrule connector
Mass flowmeter: Ar calibration range 100sccm
Vacuum pump: Bipolar rotary vane vacuum pump
Ultimate vacuum: 0.1Pa
cooling method: Water-cooled copper tube + air-cooled shell
RF power supply: Maximum output power 300W Automatic matching
Overall size: 560mm X 620mm X 620mm

Minimum Order: 1 sets

Click to Enlarge