dual zone rotary vacuum RF plasma CVD reactor with MFC

This product is a plasma-enhanced rotary chemical vapor deposition system (rotating
PECVD). The furnace tube adopts a variable-diameter design. The middle tube
diameter is relatively thick and there are mixing partitions, which can repeatedly
mix powder or particles with the rotation of the furnace tube. The working tube can
be rotated 360° uninterruptedly through the mechanical transmission control, so
that the materials in the tube can be stirred and mixed to obtain a uniform heating
effect; the equipment is also equipped with a plasma generator, which is connected
to the furnace tube by inductive coupling, and the generated plasma can cover the
furnace tube effectively, increase the activation energy of the reactants, reduce
the reaction temperature, and improve the reaction efficiency. The equipment is
equipped with a three-way mass flow meter and a gas mixing device, which can be
used to pass a variety of gases into the pipe. At the same time, the equipment is
equipped with a high-performance mechanical pump that can quickly evacuate the
furnace pipe to vacuum; the cooperation of the pump and the gas circuit can achieve
more A CVD process. The rotating device is very suitable for continuously coating
and modifying powder materials by CVD method in an atmosphere protected
environment.

Technical Parameters
1. Dual temperature zone tube furnace
Product model CY-O1200-60IIC-R
Equipment power 3KW
Furnace tube material High purity quartz
Furnace tube size Φ60*420+Φ100*360+Φ60*420mm (Quartz heteromorphic tube)
Furnace chamber length 440mm
Heating zone length 200mm+200mm
Operating temperature 0～1150℃
Limit temperature 1200℃
Temperature control accuracy ±1℃
Thermocouple type K-type thermocouple
Temperature control mode 30-segment program temperature control, PID
parameter self-tuning
Display mode HD full color LCD touch screen
Sealing method 304 stainless steel vacuum flange
Power supply AC: 220V 50/60Hz
Rotation speed 0~13rpm
Tilt angle 0~35°

2. 3-channel mass flow meter
Product model CY-3Z
Number of gas paths 3 channels
Flowmeter type Mass flowmeter
Measuring range A channel: 0~100sccm; B channel: 0~200 sccm; C channel: 0~500 sccm
Measurement accuracy ±1.5%
Working pressure difference 0.1~0.5MPa
Pipeline interface 1/4 inch ferrule connector
Power supply AC220V 50/60Hz

3. Vacuum system Vacuum pump Dual stage rotary vane pump
Pumping speed 1.1L/s
Pumping port KF16
Pump ultimate vacuum
Power supply AC220V 50/60Hz

4. RF power supply
Signal frequency 13.56MHz±0.005%
Power output range 0~500W
Maximum reflected power 100W
RF output interface 50Ω, N-Type, female
Power stability ≤5W

Minimum Order: 1 sets

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