dual target magnetron sputter and thermal evaporation machine

Dual target magnetron sputter and thermal evaporation composite coating machine
CY-MS500S-2TA1S magnetron sputter & thermal evaporation two-in-one coating machine
can be used for the coating of electronic products, glass, ceramic samples, metal
and other samples, especially suitable for sample preparation of laboratory SEM
(scanning electron microscope).
The equipment is mainly composed of stainless steel vacuum chamber, magnetron
sputtering target, evaporation source, rotary heating sample table, vacuum pump
unit, vacuum measurement gauge, air intake system and control system.

Features
a.Touch screen operation, temperature control meter detection. Digital parameter
interface and automatic operation mode provide users with an excellent research and
development platform;
b.The vacuum chamber is made of 304 stainless steel with observation window and
baffle. Beautiful shape, fine workmanship, excellent vacuum performance. The main
sealing flange is CF series high vacuum sealing flange. Each interface of vacuum
chamber is sealed with rubber seal ring, which has excellent vacuum performance and
can effectively ensure the coating quality;
c.The target is located at the bottom of the cavity, and the target is upward. The
sample table has the function of heating and rotating, which can make the coating
effect more uniform;;
d.The vacuum acquisition system adopts two-stage vacuum pump group. The backing
pump is mechanical pump with high pumping speed, which can effectively reduce the
time from atmospheric pressure to low vacuum. The main pump is turbine molecular
pump, which has high pumping speed and faster vacuum acquisition speed. The overall
vacuum acquisition system is clean and fast.

Technical parameter
1. Model CY-MS500S-2TA1S
2. Sample table
Size150mm Dia.;Heating ≤500℃;Rotation speed 1-20r/min;Temp control ±1℃
3. Magnetron sputter head,Quantity 2-inch ×2 Cooling mode Water cooled
4. Thermal evaporation evaporator source,Tungsten wire basket Max temp
1500℃,Thermocouple S type  
5. Vacuum chamber Size 300mmDia.× 300mmH Watch window 100mm Dia.
Material 304 SUS Open mode Front opening door
6. Vacuum system
Mechanical pump Rotary vane pump Extraction interface KF16 Pumping 1.1L/s
Molecular pump Turbo molecular pump Extraction interface CF150
Pumping 600L/s Exhaust interface KF40
Vacuum gauge Resistance gauge + ionization gauge
Ultimate vacuum degree 1.3x10-4Pa Power supply AC;220V 50/60Hz
7. Sputter power supply DC power supply 1 set Output power ≤1000W
Output voltage ≤600W Response time ＜5ms
RF power supply 1 set Output power ≤1000W Power stability ≤5W
RF frequency 13.56MHz RF stability ±0.005%
8. Film thickness gauge Resolution±0.03Hz,Accuracy ±0.5%,Upper range limit 50000
Speed 100~1000ms
9. Water cooled system Tank volume 9L Flow 10L/min
10. Gas system Flowmeter type MFC(mass flow meter),Range 200sccm,Gas type Ar
11. Other Input supply AC220V,50Hz Size 1400x750x1300mm
Total power 4kw（host+vacuum pump） Weight 295kg

Minimum Order: 1 sets

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