dc rf magnetron 2-gun co-sputtering machine with reciprocating sample

Dual target magnetron sputtering machine with reciprocating sample stage
CY-MSP500S-DCRF-RE is a laboratory-specific magnetron sputtering coater with two
target positions developed by our company. The equipment is equipped with a DC
power supply and a radio frequency power supply, which can be used to prepare
single or multilayer iron Electrical film, conductive film, alloy film,
semiconductor film, ceramic film, dielectric film, optical film, etc.

Features
a.Compared with ordinary plasma sputtering, magnetron sputtering has the advantages
of high energy and speed, high coating rate, low sample temperature rise, and is a
typical high-speed low-temperature sputtering.
b.The magnetron sputter target is equipped with a water-cooled interlayer. The
water-cooled machine can effectively take away the heat and avoid the heat
accumulation on the target surface, so that the magnetron sputter can work stably
for a long time.
c.The sample stage adopts a reciprocating design, and the left side is equipped
with a magnetic coupling push rod, which can push the sample stage left and right.
d.The whole machine adopts touch screen control, built-in one-button coating
program, easy to operate, it is an ideal equipment for laboratory preparation of
films

Technical parameter
1. Model CY-MSP500S-DCRF-RE
2. Input AC220V，50Hz
3. Total power 6KW
4. Ultimate vacuum degree 5x10-4Pa
5. Sample table parameters
Size 100mm x 100mm
Reciprocating stroke 200mm
6. Magnetron sputtering head parameters
Quantity 2-set，2-inch
Cooling mode Water cooled，required flow rate10L/min
Water chiller 10L/min circulating water cooling
7.Vacuum chamber Size
φ500mm X 490mm H
Material Stainless steel
Watch window φ100mm
Open mode front opening door
8. Gas flow controller 1channel 200sccm Ar；
9. Vacuum pump Molecular pump system pumping600L/S
10. Film thickness gauge Quartz vibrating film thickness gauge ，one set，
Resolution 0.10 Å
11. Sputter power supply
DC power supply：one set，500W，for preparing metal films
RF power supply：one set，500W，for non - metallic coating
12. Operating mode All-in-one computer operation
13. Overall dimensions 1090mm X 900mm X 1250mm
14. Total weight 350kg

Minimum Order: 1 sets

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