bottom target type dc rf magnetron 2-gun co-sputtering machine

Dual target DC RF magnetron sputtering coating machine---bottom target type
CY-MSP500S-DCRF-B is a special laboratory coating machine with two targets
developed by our company. It is equipped with a DC power supply and a RF power
supply. It can be used to prepare single or multi-layer ferroelectric thin films,
conductive films, alloy films, semiconductor films, ceramic films, dielectric
films, optical films, etc.

Features
a.Compared with the conventional plasma sputtering, magnetron sputtering has the
advantages of high energy, high speed, high deposition rate and low sample
temperature rise;
b.The magnetron target is equipped with water-cooled interlayer. The water cooler
can effectively take away heat and avoid heat accumulation on the target surface,
so that the magnetron coating can work stably for a long time;
c.This model adopts the layout of under target, the sample table is on the top, and
the height with the target surface can be precisely adjusted by program, and can be
rotated and heated, with excellent performance.

Technical parameter
1. Model CY-MSP500S-DCRF-B
2. Input AC220V，50Hz
3. Total power 6KW
4. Ultimate vacuum degree 5x10-4Pa
5. Sample table parameters Size 150 Dia.
Height 70 mm adjustable
Heating ≤500℃
Rotation speed 1-20 rpm
6. Magnetron sputtering head parameters Quantity 2-set，2-inch
Cooling mode Water cooled，required flow rate10L/min
Water chiller 10L/min circulating water cooling
7. Vacuum chamber Size 500mmDia. × 490mm H
Material Stainless steel
Watch window 100mm Dia.
Open mode front opening door
8. Gas flow controller 1channel 200sccm Ar；
9. Vacuum pump Molecular pump system pumping,600L/S
10. Film thickness gauge Quartz vibrating film thickness gauge ，
one set，Resolution 0.10 Å
11. Sputter power supply
DC power supply：one set，500W，for metal films
RF power supply：one set，500W，for non-metallic films
12. Operating mode All-in-one computer operation
13. Overall dimensions 1090mm X 900mm X 1250mm
14. Total weight 350kg

Minimum Order: 1 sets

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