Boron Trichloride, BCL3 Specialty Gas

Boron trichloride (BCL3) is a colorless fuming liquid or gas. Non-flammable,
irritating, acidic odor.
Boron trichloride (BCl3) is a low vapor pressure gas. The molecule can be used
in a wide range of applications, such as drying etching gases used for aluminum
wiring in semiconductor and LCD manufacturing. Boron trichloride is a liquefied
gas that decomposes in water into hydrogen chloride and boric acid. It is the
main gas component in high-K and metal anisotropic plasma etching, atomic layer
etching and pulsed plasma etching. BCL3 Gas is also mainly used for fine
etching of aluminum circuits in the liquid crystal panel manufacturing process.
CAS No. 10294-34-5
UN No. 1741
EINECS No. 233-658-4
Molecular weight 117.19
Appearance colorless fuming liquid or gas with a pungent and sour taste
Melting point -107.3℃
Boiling point 12.5℃
Density 1.35 kg/m³
DOT Class 2.3 & 8
Label Toxic Gas, Corrosives

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