3 zone 1200 ℃ CVD furnace with MFC flowmeter for graphene

Chemical vapor deposition (CVD) refers to the method of chemical gas or steam
reacting on the substrate surface to synthesize coatings or nano materials. It is
the most widely used technology in semiconductor industry to deposit a variety of
materials, including a wide range of insulating materials, most metal materials and
metal alloy materials

CY-O1200-50IIIT-3F-LV 1200℃ three heating zone low vacuum CVD furnace consists of
a three-heating zone tube furnace, a three-channel float flow meter and a double
stage rotary vane vacuum pump
It is suitable for high-temperature sintering, metal annealing, quality inspection,
etc. in universities, research institutes, industrial and mining enterprises,
especially for CVD experiments that require a variety of gas mixing atmospheres.

Vacuum tube   furnace Model CY-O1200-50IIIT
Tube material High purity quartz
Tube diameter 50mm (optional: 60mm, 80mm, 100mm)
Tube length 1300mm
Furnace chamber   length 1060mm
Heating zone   length 300mm+300mm+300mm
Operating   temperature 0～1100℃
Temperature   control accuracy ±1℃
Temperature  control mode 30 or 50 segment program temperature
control
Display mode LCD
Sealing   method 304 stainless steel vacuum flange
Flange   interface 1/4" ferrule connector, KF16/25/40 joint
Vacuum 4.4E-3Pa
Power supply AC:220V   50/60Hz
Gas supply   system Model CY-3F
Gas channel 3-channel
Measuring   unit Gas float flowmeter
Measuring   range A channel: 0～100ml H2 gas Remarks: If you
need other ranges or gas types, you need to specify when ordering. According to the
customer's specific requirements, the flow meter of the   corresponding gas type
and range can be selected.
B channel: 16～160ml N2 gas
C channel: 25～250ml Ar gas
measurement  accuracy ±2.0%
Pipe pressure resistance 3MPa
Working   pressure difference 50～300KPa
Connecting   pipe 304 stainless steel
Gas channel 304 stainless steel needle valve
Interface   specification 1/4" ferrule connector for gas inlet and
outlet
Exhaust   system Mechanical   pump Rotary vane pump
Pumping rate 1.1L/S   
Exhaust   interface KF16
Vacuum   measurement Resistance gauge
Ultimate   vacuum 1.0E-1Pa
Power supply AC:220V   50/60Hz
Pumping   interface KF16

Minimum Order: 1 sets

Click to Enlarge