15L 300W RF plasma cleaner with vacuum pump

15L plasma cleaner is a compact, non-destructive cleaning device. The plasma
cleaner uses low air pressure to excite plasma as a cleaning medium, thereby
effectively avoiding secondary pollution caused by the liquid cleaning medium to
the object to be cleaned.The device is equipped with a mechanical vacuum pump,
while vacuuming maintains the vacuum of the chamber, the pollutants after the
plasma reaction can also be pumped away by the vacuum pump; therefore, the short-
time cleaning can completely clean the organic pollutants.
In addition to the cleaning function, this small plasma cleaner can change the
surface properties of some materials according to the needs under certain
conditions. During the cleaning process, the glow discharge of the small plasma
cleaner not only enhances the adhesion, compatibility and wettability of these
materials, but also disinfects and sterilizes the materials.

Applications:
Small plasma cleaners are widely used in the fields of optics, optoelectronics,
electronics, materials science, life sciences, polymer science, biomedicine, and
microfluidics.


Technical parameter
1. Cleaning the chamber
Chamber material Stainless steel
Chamber size 220mm*220mm*310mm

2.RF power supply
Power supply features The power supply is an all-solid-state RF power supply, and
adopts a high-stability and high-reliability power amplifier module and a DC
module, which effectively ensures the RF power output of the power supply. High
quality electronic components are used to ensure the reliability of the products.
Power advantage ● Long time normal operation
● Simple and flexible operation
● High power supply efficiency and low heat generation
●With perfect reflection power protection function
RF power 0~300W continuously adjustable，auto-match
Signal frequency 13.56MHz ±0.005%
Reflected power ≤100W
Power stability ±0.1%
RF connector N type connector
Machine efficiency ≥75%
Harmonic component ≤-50 dBc
Cooling method Forced air cooling

3.Gas measurement Measuring unit Float flowmeter
Gas channel Two channels(O2 和Ar)
Vacuum Vacuum measurement Digital vacuum gauge (resistance gauge)
Vacuum pump Two-stage rotary vane vacuum pump VRD-4
Motor speed 50 Hz: 1440; 60 Hz: 1720
Pumping rate 50 Hz: 1.1L/s; 60 Hz: 1.3L/s
Vacuum range 0.1Pa～10000Pa
Ultimate vacuum 0.5Pa
Motor noise ≤56dB
Pipe interface Gas inlet: KF16; exhaust port KF16.
Connecting pipe KF16 vacuum bellows
Vacuum valve KF16 ball valve
Motor Power 400W

4.Others
Power supply AC220V 50Hz
Total power 800W
Operating temperature -10℃-- 40℃
Working vacuum ≤40Pa
Overall size 650mm×650mm×550mm

Minimum Order: 1 sets

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