1200℃ mini CVD tube furnace for graphene preparation

This CVD system is specially designed for graphene production, using a 1200℃ mini
tube furnace, equipped with a high-precision mass flow meter and a thin-film vacuum
gauge. Compared with the conventional Pirani resistance gauge, the reading of the
thin film gauge is accurate and not affected by the type of gas, which is very
suitable for the vacuum coating process. At the same time, the equipment is
equipped with a combustible gas detection device, which is linked with a solenoid
valve at the air outlet. Once there is a leakage, the solenoid valve can be closed
to ensure safety.
This set of equipment has a small footprint and is very suitable for laboratory
preparation of CVD.

Technical parameters:
1. 200℃ Mini Tube Furnace Parameters:
Supply voltage AC220V, 50Hz
Maximum power 2KW
Heating zone Single heating zone 200mm
Constant temperature zone length 100mm
Heating element Heat-resistant alloy wire
Thermocouple Type K
Operating temperature ≤1150℃
Heating rate Suggest ≤10℃/min
Temperature control accuracy ±1℃
Temperature control method AI-PID 30-segment process curve, with overheat and
burnout protection
Furnace tube material High purity quartz
Furnace tube size φ50mm O.D x 450mm L
Vacuum pump Mechanical pump pumping speed 1.1L/s
Ultimate vacuum 5Pa

2. Three-channel mass flow meter parameters:
Valve type Stainless steel needle valve
Number of gas paths Three
Pressure range 0.05~0.3MPa
Range Ar 0~500sccm
H2 0~200sccm
CH4 0~10sccm
Flow control range ±1.5%
Mixing tank volume 750mL
Gas path material 304 stainless steel
Pipe interface 6.35mm ferrule connector
Power supply AC220V 50Hz

Minimum Order: 1 sets

Click to Enlarge